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OXFORD Aztec Series

The TM4000 Series offers multiple EDS systems to choose from based on application and budget. Two classes of detectors are available: a low-cost 10-mm2 detector and a large-sized 30-mm2 detector, both of which are of compact design. Neither configuration requires LN2

  • Example configuration of Aztec EDS in combination with a TM4000 Series SEM
  • Detector: Built-in type (Manufactured by Oxford Instruments (UK))

The AZtec series EDS systems feature icons arranged in order of the procedural flow to make operation easy. With its spectrum-fitting functionality, element superposition can be easily observed, and the TruMap feature allows elements with overlapping peaks to be properly separated and concisely displayed (AZtecOne).

  • Basic: AZtecOneGO
  • Advanced: AZtecOne
  • Multi-featured analysis instrument: AZtec Energy


Flexible mapping analysis

  • In addition to standard spectrum acquisition, the system allows spectra for user-specified regions to be reconstructed from the corresponding mapping data. The selected region may be defined as a point, rectangle, ellipse, or region bound by a user-drawn freehand curve.


High-precision and multifaceted TruMap function

  • TruMap feature allows multi-element spectra to be properly separated and background-subtracted in real time, resulting in a precise elemental mapping with no image contamination from overlapping peaks.
  • In the example shown, data from Mg-K and As-L, whose peaks overlap in typical maps, are clearly resolved and free from signal overlap with the TruMap function.

AZtec Energy

The AZtec Energy system offers advanced analytical functionality and flexible configurations with the ability to automate analyses via a motorized stage, enabling wide-area mapping and particle analysis.

Wide-area mapping option: AZtec Large-Area Mapping

The Aztec Mapping software automatically acquires data for multiple specified regions to produce a single combined set of mapping information.





AZtecEnergy Miniscope Edition

Detector type

Silicon Drift Detector (SDD)

Detection area

10 mm2

30 mm2

30 mm2

Energy resolution

151 eV(Cu-Kα)
(equivalent to 129 eV with MnKα)

158 eV(Cu-Kα)
(equivalent to 129 eV with MnKα)

158 eV(Cu-Kα)
(equivalent to 129 eV with MnKα)

Detection element



AZtecFeature is an innovative particle analysis system optimized for both usability and high-speed throughput. It combines the  speed and sensitivity of the Oxford Silicon Drift Detector with the superior analytical performance and ease of use of the AZtec® EDS analysis suite to create the most advanced automated particle analysis platform on the market.

Fast and Powerful

  • Unleashes the potential of the latest generation of Detectors – delivering sensitivity when count rates are low and high capacity when count rates are high.
  • AZtec has 64-bit performance and is truly multi-tasking
  • Up to 200,000 particles characterized on one sample
  • Real-time detection, morphology and chemistry analysis
  • On-line or post acquisition elemental and phase analysis of particles
  • Parallel analysis and reporting during acquisition


  • AZtecFeature incorporates Tru-Q technology to provide unparalleled elemental identification and quantitative analysis without requiring user intervention, making it the ideal system for unattended data collection.
  • Unique pulse pile-up correction ensures accurate quantitative analysis even at the highest count rates.

Easy to Use

  • Even for new samples, results are obtained in seconds – there’s no need for laborious setup procedures.
  • Morphological and chemical measurements are acquired automatically and are easily incorporated into particle classification schemes.
  • The complete system setup can be stored as a recipe and recalled at a later date.

AZtecFeature is as automated as possible…as flexible as needed

Data in seconds…

Automated feature and particle analysis has never been so easy! Basic particle sizing is available immediately: click on one particle and others in a similar grey level will be automatically detected and their morphology displayed.

  • Real-time calculation of morphological parameters
  • Particle size, shape, aspect ratios are shown instantly
  • Manually fine-tune particle detection by adjusting thresholds and adding image filters for noise reduction, particle separation etc.

As AZtecFeature is fully integrated with the rest of the AZtec Suite, adding chemical data could not be easier…

  • Acquire an EDS spectrum for each particle automatically
  • Use existing settings in the AZtec user profile for spectrum processing
  • Generate the right result using Tru-Q®algorithms
  • Start building a classification scheme at the click of a button


A simple step from single field to large area analysis

Going from single field analysis to acquiring data over a large area of a specimen or even several specimens is easy:

  • A wizard guides users through the setting up of areas and samples
  • Areas can be stored and recalled for later use
  • For each sample, up to 200,000 particles over thousands of fields of view can be analyzed automatically
  • The system fully automates the stage movement, image acquisition and EDS acquisition and stitches the acquired data together into a single large area. Individual fields are automatically shown in a montaged view during acquisition
  • See the ‘big picture’ and zoom into details during acquisition
  • Relocate to any field and acquire data for further analysis
  • Automatic system pause when a blown filament is detected (microscope dependent)


As soon as data from a particle is acquired, it is added to a customizable list displaying morphological and compositional measurements and particle classifications.

  • Interact with and interrogate the tabulated results while data acquisition is still in progress
  • Visualize data in the form of histograms and summary reports can be generated directly into Microsoft Word
  • For further, more detailed analysis and plotting options, comprehensive data export into Microsoft Excel is available
  • Detectors clearly resolve down to Be in the Periodic Table
  • The same excellent resolution, guaranteed on your microscope

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