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Hitachi FlexSEM 1000

Hitachi High Technologies America, Inc.

The FlexSEM 1000 VP-SEM combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package. Cutting-edge technology and circuitry provides unrivaled imaging performance, even in variable-pressure environments, a feature previously only available in a full-sized SEM.

The FlexSEM runs on clean energy for an economical analytical tool, without compromising performance.

The FlexSEM will change your view of electron microscopy!

FlexSEM1000 features:

  • Resolution
    • 4.0nm at 20kV(High Vacuum)
    • 15nm at 1kV(High Vacuum)
    • 5.0nm at 20kV (Low Vacuum)
  • Magnification
    • 6x-300,000x(photo mode)​
    • 16x-800,000(on display)
  • Accelerating Voltage
    • 0.3 to 20 kV​
  • Specimen stage
    • 3-Axis Motorized Stage​
    • X: 0-40mm Y:0-50mm Z:5 to 15mm R:360 T:-15 to +90
  • Electron Gun
    • Pre-center cartridge filament​
  • Detectors
    • Everhart Thornley Secondary Electron Detector​
    • High sensivity semiconductor BSE detector
  • Automatic Image adjustment
    • Auto brightness/contrast​
    • Auto focus/stigmation
    • Auto Start
    • Auto beam alignment
    • Auto optical alignment
  • Image data saving
    • 640×480, 1280×960, 2560×1920, 5120×3840 pixels​
  • Auxiliary Functions
    • Raster rotation​
    • Dynamic focus/tilt compensation
    • Image enhancement function
    • SEM Map(stage navigation)
    • Beam marking

For more information: Hitachi FlexSEM1000


A compact design (450 mm wide) minimizes system footprint. The FlexSEM is designed with separable units for flexible system placement. The entire system requires only a standard wall outlet for power.

Electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission current.

Accelerating Voltage: 20 kV
Secondary Electron (SE) Image
Magnification: 60,000X
Resolution: 4.0 nm

Accelerating Voltage: 20 kV
Backscattered Electron (BSE) Image
Magnification: 50,000X
Resolution: 5.0 nm

Ultra-Variable-Pressure Detector

Novel low vacuum technologies enable observation of the surface of non-conductive specimens without preprocessing, across the entire pressure and accelerating voltage ranges.

New & Improved Auto Functions

The user interface is easy to operate even by novice users, and with the various automated functions, high-quality and quick data acquisition can be accomplished regardless of user experience level. A touch panel operation is possible.

Intuitive & Correlative Navigation

SEM MAP helps to locate regions of interest quickly, and delivers accurate correlated optical and SEM images using only one click. Optical and EM correlation function, SEM MAP is fully integrated into the graphical user interface.

Our worldwide Distributor and Partner network offers unequaled technical support for you, and for all of our customers.